via P. Gobetti 101, 40129 Bologna, Italy
ing. Piera Maccagnani, Tel. +39 051 6399 104, Fax +39 051 6399216
e-mail: maccagnani@bo.imm.cnr.it
Full range of business activities: The Institute of Microelectronic and Microsystem (IMM) is one of the Institutes of the Italian National Research Council (CNR). It is organised in five different departments. The Bologna department of IMM has both the capability of characterizing materials and devices by different methods (SEM, TEM, RBS) and the possibility of fabricating devices by using the standard processes of the silicon planar technology as well as advanced techniques. Its facilities include a class 100 clean room with a complete technological line for realization of integrated silicon devices and circuits, and a section dedicated to silicon micromachining. Role in the project: Project and fabrication of a silicon monolithic array of SPAD. The SPAD array will be fabricated in a low-voltage low-power custom technology, compatible with CMOS technology. The SPAD array will combine the general advantages of the silicon microelectronic devices (e.g. miniature size, ruggedness and reliability and insensitivity to magnetic field) with a very high sensitivity, high timing response and low detector noise. Qualification for these roles: Extended investigations have been devoted to study the technological processes and to the develop models for their simulation. In particular, the doping by ion implantation and thermal predeposition have been analyzed in detail. Large experience in electrical characterization of silicon devices or test structures both at wafer or package level and extraction of the related parameters. Good knowledge in design of integrated circuits, simulation of technological processes and mask layout design.